There are two ways to form inverted questions with a reflexive verb in Le Passé Composé, depending on whether the subject is a pronoun (je/tu/il/elle/on/nous/vous/ils/elles) or a noun (Marie, la fille, etc).
1- The subject is a pronoun
See also Inverted questions in the compound past (Le Passé Composé) in French - with subject pronouns
In this case, the order will be as follows:
(question word) + reflexive pronoun (me/te/se/nous/vous) + auxiliary être + hyphen + je/tu/il/elle/on/nous/vous/ils/elles + past participle
Tu t'es levé à cinq heures. -> T'es-tu levé à cinq heures ?
You got up at 5. -> Did you get up at 5?
Here are more examples:
2- The subject is a noun
See also Inverted questions in the compound past (Le Passé Composé) in French - with nouns
In this case, the order will be as follows:
(question word) + noun + reflexive pronoun (se/nous/vous) + auxiliary être + hyphen + il/elle/nous/vous/ils/elles + past participle
Laurent s'est couché à onze heures. -> Laurent s'est-il couché à onze heures ?
Laurent went to bed at 11. -> Did Laurent go to bed at 11?
Here are more examples:
Inverted questions in the present tense (Le Présent) in French - il/elle/on forms
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